モノシラン (SiH4)
SiH4は半導体、ディスプレイ及び太陽電池の製造工程で使用され、Si絶縁膜、Si反射防止膜を形成するために使用されます。
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ISO CONTAINER
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Y-CYLINDER
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BUNDLE
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INDIVIDUAL
SPECIFICATION
Unit : ppmv| SiH4 | O2+Ar | N2 | H2 | CO | CO2 | CH4 | H2O |
|---|---|---|---|---|---|---|---|
| 99.9999% [Excluded H2] |
1.0 | 1.0 | 20.0 | 0.1 | 0.1 | 0.1 | 1.0 |
| SiH4 | 99.9999% [Excluded H2] |
|---|---|
| O2+Ar | 1.0 |
| N2 | 1.0 |
| H2 | 20.0 |
| CO | 0.1 |
| CO2 | 0.1 |
| CH4 | 0.1 |
| H20 | 0.1 |
CYLINDERS INFORMATION
| TYPE | MATERIAL | FILLING WEIGHT | VALVE CONNECTION TYPE | |
|---|---|---|---|---|
| 47L | Mn Steel | 10 / 12 kg | CGA/DISS632, CGA350, JIS-22-14L etc. |
|
| Bundle | Customized | CGA/DISS632, JIS-22-14L etc. | ||
| Y-CYLINDER | Cr-Mo Steel | 100 / 125 kg | ||
| ISO Container | 20ft | 2,200 kg | CGA/DISS632 etc. | |
| 40ft | 5,500 kg | |||
| TYPE | 47L |
|---|---|
| MATERIAL | Mn Steel |
| FILLING WEIGHT | 10 / 12 kg |
| VALVE CONNECTION TYPE | CGA/DISS632, CGA350, JIS-22-14L etc. |
| TYPE | Bundle |
|---|---|
| MATERIAL | Mn Steel |
| FILLING WEIGHT | Customized |
| VALVE CONNECTION TYPE | CGA/DISS632, JIS-22-14L etc. |
| TYPE | Y-CYLINDER |
|---|---|
| MATERIAL | Cr-Mo Steel |
| FILLING WEIGHT | 100 / 125 kg |
| VALVE CONNECTION TYPE | CGA/DISS632, JIS-22-14L etc. |
| TYPE | ISO Container | |
|---|---|---|
| MATERIAL | Cr-Mo Steel | |
| FILLING WEIGHT | 20ft | 2,200 kg |
| 40ft | 5,500 kg | |
| VALVE CONNECTION TYPE | CGA/DISS632 etc. | |
