Nitrogen trifluoride (NF3)
NF3 is used during the manufacturing process of semiconductor, display and PV,
as it removes residues from inner wall of the chamber after CVD manufacturing process.
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ISO CONTAINER
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Y-CYLINDER
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BUNDLE
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INDIVIDUAL
SPECIFICATION
Unit : ppmvNF3 | O2+Ar | N2 | CF4 | CO | CO2 | N2O | SF6 | HF | H2O |
---|---|---|---|---|---|---|---|---|---|
99.999% | 1.0 | 1.0 | 10.0 | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 |
NF3 | SPECIFICATIO | |
---|---|---|
Purity | NF3 | 99.999% |
Impurity (ppmv) |
O2+Ar | < 1.0 |
N2 | < 1.0 | |
CF4 | < 10.0 | |
CO | < 1.0 | |
CO2 | < 1.0 | |
N2O | < 1.0 | |
SF6 | < 1.0 | |
HF | < 1.0 | |
H2O | < 1.0 |
CYLINDERS INFORMATION
TYPE | MATERIAL | FILLING WEIGHT | VALVE CONNECTION TYPE | |
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47L | Mn Steel | 15 / 20 / 22.7 kg | CGA/DISS640, CGA 330, JIS-22-14R/L etc. |
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Bundle | Customized | |||
Y-CYLINDER | Cr-Mo Steel | 195 / 200 kg | CGA/DISS640 etc. | |
ISO Container | 20ft | 4,200 kg | ||
40ft | 8,000 kg |
47L | SPECIFICATIO |
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MATERIAL | Mn Steel |
FILLING WEIGHT | 15 / 20 / 22.7 kg |
VALVE CONNECTION TYPE | CGA/DISS640, CGA 330, JIS-22-14R/L etc. |
Bundle | SPECIFICATIO |
---|---|
MATERIAL | Mn Steel |
FILLING WEIGHT | Customized |
VALVE CONNECTION TYPE | CGA/DISS640, CGA 330, JIS-22-14R/L etc. |
Y-CYLINDER | SPECIFICATIO |
---|---|
MATERIAL | Cr-Mo Steel |
FILLING WEIGHT | 195 / 200 kg |
VALVE CONNECTION TYPE | CGA/DISS640 etc. |
ISO Container | SPECIFICATIO | |
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MATERIAL | Cr-Mo Steel | |
FILLING WEIGHT | 20ft | 4,200 kg |
40ft | 8,000 kg | |
VALVE CONNECTION TYPE | CGA/DISS640 etc. |
