Nitrogen trifluoride (NF3)
NF3 is used during the manufacturing process of semiconductor, display and PV,
as it removes residues from inner wall of the chamber after CVD manufacturing process.
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ISO CONTAINER
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Y-CYLINDER
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BUNDLE
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INDIVIDUAL
SPECIFICATION
Unit : ppmv| NF3 | O2+Ar | N2 | CF4 | CO | CO2 | N2O | SF6 | HF | H2O |
|---|---|---|---|---|---|---|---|---|---|
| 99.999% | 1.0 | 1.0 | 10.0 | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 |
| NF3 | SPECIFICATIO | |
|---|---|---|
| Purity | NF3 | 99.999% |
| Impurity (ppmv) |
O2+Ar | < 1.0 |
| N2 | < 1.0 | |
| CF4 | < 10.0 | |
| CO | < 1.0 | |
| CO2 | < 1.0 | |
| N2O | < 1.0 | |
| SF6 | < 1.0 | |
| HF | < 1.0 | |
| H2O | < 1.0 | |
CYLINDERS INFORMATION
| TYPE | MATERIAL | FILLING WEIGHT | VALVE CONNECTION TYPE | |
|---|---|---|---|---|
| 47L | Mn Steel | 15 / 20 / 22.7 kg | CGA/DISS640, CGA 330, JIS-22-14R/L etc. |
|
| Bundle | Customized | |||
| Y-CYLINDER | Cr-Mo Steel | 195 / 200 kg | CGA/DISS640 etc. | |
| ISO Container | 20ft | 4,200 kg | ||
| 40ft | 8,000 kg | |||
| 47L | SPECIFICATIO |
|---|---|
| MATERIAL | Mn Steel |
| FILLING WEIGHT | 15 / 20 / 22.7 kg |
| VALVE CONNECTION TYPE | CGA/DISS640, CGA 330, JIS-22-14R/L etc. |
| Bundle | SPECIFICATIO |
|---|---|
| MATERIAL | Mn Steel |
| FILLING WEIGHT | Customized |
| VALVE CONNECTION TYPE | CGA/DISS640, CGA 330, JIS-22-14R/L etc. |
| Y-CYLINDER | SPECIFICATIO |
|---|---|
| MATERIAL | Cr-Mo Steel |
| FILLING WEIGHT | 195 / 200 kg |
| VALVE CONNECTION TYPE | CGA/DISS640 etc. |
| ISO Container | SPECIFICATIO | |
|---|---|---|
| MATERIAL | Cr-Mo Steel | |
| FILLING WEIGHT | 20ft | 4,200 kg |
| 40ft | 8,000 kg | |
| VALVE CONNECTION TYPE | CGA/DISS640 etc. | |
