Cleaning Gases
Korea’s First and World-leading Manufacturer of Nitrogen Trifluoride As the first manufacturer of nitrogen trifluoride (NF3) in Korea,SK materials has been stably providing its customers with high-quality nitrogen trifluoride through novel technology development and proactive investments in facilities since 2001.
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Nitrogen trifluorideNF3
NF3 is used during the manufacturing process of semiconductor, display and PV, as it removes residues from inner wall of the chamber after CVD manufacturing process.