모노클로로실란 (SiH3Cl)

SiH3Cl(MCS)는 반도체 및 디스플레이 공정용으로 사용되는 Precursor의 원재료입니다.

SPECIFICATION

Unit : %
SiH3Cl N2 SiH4 SiH2Cl2 SiHCl3 SiCl4 HCl
98.0 0.1 1.5 0.1 0.1 0.1 0.1
SiH3Cl SPECIFICATIO
Purity SiH3Cl 98.0
Impurity N2 0.1
SiH4 1.5
SiH2Cl2 0.1
SiHCl3 0.1
SiCl4 0.1
HCl 0.1

CYLINDERS INFORMATION

TYPE MATERIAL FILLING WEIGHT VALVE CONNECTION TYPE
47L Mn Steel, Cr-Mo Steel 26 kg CGA/DISS636 etc.
47L SPECIFICATIO
MATERIAL Mn Steel, Cr-Mo Steel
FILLING WEIGHT 26 kg
VALVE CONNECTION TYPE CGA/DISS636 etc.
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