디클로로실란 (SiH2Cl2)

SiH2Cl2는 반도체 제조공정에서 질화막(SixNy) 증착시 사용됩니다.

  • INDIVIDUAL

SPECIFICATION

Unit : ppmv
SiH2Cl2 O2+Ar N2 CO CO2 CH4 H2 SiH3Cl SiHCl3 SiCl4
99.9% 1.0 1.0 1.0 1.0 1.0 10.0 100 100 100
SiH2Cl2 SPECIFICATIO
Purity SiH2Cl2 99.9%
Impurity O2+Ar 1.0
N2 1.0
CO 1.0
CO2 1.0
CH4 1.0
H2 10.0
SiH3Cl 100
SiHCl3 100
SiCl4 100

CYLINDERS INFORMATION

TYPE MATERIAL FILLING WEIGHT VALVE CONNECTION TYPE
40L SUS 316L 35~40 kg JIS 22L, CGA/DISS636 etc.
10L 8.5~10kg
CYLINDERS INFORMATION SPECIFICATIO
MATERIAL SUS 316L
FILLING WEIGHT 8.5~10(10Li) / 35~40(40Li) kg
VALVE CONNECTION TYPE JIS 22L, DISS 636 etc.
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