삼불화질소 (NF3)

NF3는 반도체, 디스플레이 및 태양전지의 제조공정에서 사용되며,
CVD 공정 후 Chamber 내부 잔류물을 제거하기 위한 Cleaning 용도로 사용됩니다.

  • ISO CONTAINER
  • Y-CYLINDER
  • BUNDLE
  • INDIVIDUAL

SPECIFICATION

Unit : ppmv
NF3 O2+Ar N2 CF4 CO CO2 N2O SF6 HF H2O
99.999% 1.0 1.0 10.0 1.0 1.0 1.0 1.0 1.0 1.0
NF3 SPECIFICATIO
Purity NF3 99.999%
Impurity O2+Ar 1.0
N2 1.0
CF4 10.0
CO 1.0
CO2 1.0
N2O 1.0
SF6 1.0
HF 1.0
H2O 1.0

CYLINDERS INFORMATION

TYPE MATERIAL FILLING WEIGHT VALVE CONNECTION TYPE
47L Mn Steel 15 / 20 / 22.7 kg CGA/DISS640, CGA 330,
JIS-22-14R/L etc.
Bundle Customized
Y-CYLINDER Cr-Mo Steel 195 / 200 kg CGA/DISS640 etc.
ISO Container 20ft 4,200 kg
40ft 8,000 kg
47L SPECIFICATIO
MATERIAL Mn Steel
FILLING WEIGHT 15 / 20 / 22.7 kg
VALVE CONNECTION TYPE CGA/DISS640, CGA 330, JIS-22-14R/L etc.
Bundle SPECIFICATIO
MATERIAL Mn Steel
FILLING WEIGHT Customized
VALVE CONNECTION TYPE CGA/DISS640, CGA 330, JIS-22-14R/L etc.
Y-CYLINDER SPECIFICATIO
MATERIAL Cr-Mo Steel
FILLING WEIGHT 195 / 200 kg
VALVE CONNECTION TYPE CGA/DISS640 etc.
ISO Container SPECIFICATIO
MATERIAL Cr-Mo Steel
FILLING WEIGHT 20ft 4,200 kg
40ft 8,000 kg
VALVE CONNECTION TYPE CGA/DISS640 etc.
고객문의