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Other High-Purity Gases

In addition to manufacturing value-added items that are increasingly in demand due to
the expansion of 3D NAND and microfabrication processes, SK materials offers various
services to its customers, such as sourcing, refinement, and mixing.

SK materials
  • HeliumHe

    Helium is an inert gas used across industries as a carrier gas, purge gas, cooling gas, tracer gas for leak detection, or entertaining gas.

  • KryptonKr

    Kr is used as a momentum gas in the etching of deep holes in 3D NAND of semiconductors.

  • XenonXe

    It is a noble gas used in the etching process during the semiconductor manufacturing, which is classified as rare gas as a trace element contained in the air.

  • Silicon tetrachlorideSiCl4

    It is used as a raw material for cleaning the residual Flourine in the chamber, etching, and manufacturing Silica.

  • Silicon tetrafluorideSiF4

    It is a gas used in plasma etching and ion implantation processes of semiconductors.

  • PhosphinePH3

    It is a gas used in the ion implantation process of semiconductors.

  • ArsineAsH3

    It is a gas used in the ion implantation process of semiconductors.